Ultrasensitive leak detection during ultrahigh vacuum evacuation by quadrupole mass spectrometer

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 1, 2006, Pages 91-94

  Chen, Xu ^a   Huang, Tianbin ^a   Wang, Ligong ^a   Jin, Qiji ^a   Cha, Liangzhen ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

MASS SPECTROMETERS; ULTRAHIGH VACUUM;

METAL VALVES; ULTRASENSITIVE LEAK DETECTION; VACUUM SYSTEM;

LEAK DETECTION;

EID: 29344457430     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2137330     Document Type: Article

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