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Volumn 5894, Issue , 2005, Pages 1-9
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Control model for a continuous face sheet, MEMS based deformable membrane mirror
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Author keywords
Adaptive Optics; Close loop control; Deformable mirrors; Feedback control modeling; Membrane mirror; MEMS (Micro Electro Mechanical Systems); Optical aberrations
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Indexed keywords
DEFORMABLE MIRRORS;
FEEDBACK CONTROL MODELING;
MEMBRANE MIRRORS;
CLOSED LOOP CONTROL SYSTEMS;
FEEDBACK CONTROL;
LASER APPLICATIONS;
MICROELECTROMECHANICAL DEVICES;
MIRRORS;
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EID: 29344443501
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.621250 Document Type: Conference Paper |
Times cited : (2)
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References (4)
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