Design and test of a differential Scanning stage system for an x-ray nanoprobe instrument

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5877, Issue , 2005, Pages 1-13

  Shu, D ^a   Maser, J ^a   Holt, M ^a   Lai, B ^a   Vogt, S ^a   Wang, Y ^a   Preissner, C ^a   Han, Y ^a,b   Tieman, B ^a   Winarski, R ^a   Smolyanitskiy, A ^a,b   Stephenson, G B ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b Illinois Institute of Technology   (United States)

Author keywords

High resolution; Laser encoder; Linear actuator; Scanning stages

Indexed keywords

DC MOTORS; DOPPLER EFFECT; INTERFEROMETRY; X RAY OPTICS;

HIGH RESOLUTION; LASER ENCODER; LINEAR ACTUATOR; SCANNING STAGES;

SCANNING;

EID: 29244488299     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.617723     Document Type: Conference Paper

References (11)

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3. D. Shu, Y. Han, T. S. Toellner, and E. E. Alp, Proc. SPIE Vol. 4771 (2002) pp.78-90.
4. U.S. Patent granted No. 5,896,200, Optical design for laser encoder resolution extension and angular measurement, D. Shu, 1999.
5. U.S. Patent granted No. 6,822,733, Optical design for laser encoder resolution extension with three dimensional motion decoupling, D. Shu, 2004.
6. LDDM is a trademark of the Optodyne Inc., 1180 Mahalo Place, Compton, CA 90220, U.S.A.
7. Wang C. P., (1987), Laser & Optronics, Sept., p69-71.
8. D. Shu, T. S. Toellner, and E. E. Alp, Modular Overconstrained Weak-Link Mechanism for Ultraprecision Motion Control, Nucl. Instrum. and Methods A 467-468, 771-774 (2001).
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10. Physik Instrumente (PI) is a trademark of the Physik Instrumente GmbH & Co. Germany.
11. D. Shu, J. Maser, B. Lai, S. Vogt, M. Holt, Y. Han, B. Tieman, R. Winarski, A. Smolyanitskiy, and G. B. Stephenson, Conf. Proc., ASPE 2004 Annual Meeting, Vol. 34 (2004) pp.68-71.