Actual performance vs. modeled performance of diffractive beam splitters

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5876, Issue , 2005, Pages 1-13

  Lizotte, Todd ^a   Rosenberg, Richard ^a   Ohar, Orest ^a  

^a Hitachi Via Mechanics Ltd   (Japan)

Author keywords

Beam Shaping; Diffraction; Fan Out; Laser; Micromachining; Splitter

Indexed keywords

BEAM SHAPING; FAN OUT;

DATA ACQUISITION; DIFFRACTION; DIFFRACTIVE OPTICS; MATHEMATICAL MODELS; MICROMACHINING; SOFTWARE PROTOTYPING;

OPTICAL BEAM SPLITTERS;

EID: 29244484311     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.618549     Document Type: Conference Paper

References (5)

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2. Soifer, V. Editor," Methods for Computer Design of Diffractive Optical Elements", pp. 55-59, Wiley Series in Lasers and Applications, 2002, Danvers, MA, Wiley & Sons
3. Lizotte, T.," Beam Shaping for microvia drilling," pp. 28-33, PCFAB Magazine Feb 2003
4. Gaskill, J. D.," Linear Systems, Fourier Transforms And Optics", (ED) New York, 1978, Wiley & Sons
5. Hans Peter Herzig,"Micro-Optics - Elements, systems and applications", New York, 1998, Taylor & Francis