Application of spatially and temporally apodized non-confocal acoustic transmission microscopy to imaging of directly bonded wafers

Ultrasonics

Volumn 44, Issue 1, 2006, Pages 54-63

  Twerdowski, Evgeny ^a   Wannemacher, Reinhold ^a   Razek, Nasser ^b   Schindler, Axel ^b   Grill, Wolfgang ^a  

^a UNIVERSITY OF LEIPZIG   (Germany)

^b LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

Directly bonded wafers; Line shaped tomography; Non confocal acoustic transmission microscopy; Point spread function; Time gated signal acquisition

Indexed keywords

ACOUSTIC TRANSDUCERS; OPTICAL TRANSFER FUNCTION; SIGNAL RECEIVERS;

DIRECTLY BONDED WAFERS; LINE-SHAPED TOMOGRAPHY; TIME-GRATED SIGNAL ACQUISITION;

ACOUSTIC WAVE EFFECTS;

EID: 29244480621     PISSN: 0041624X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultras.2005.08.001     Document Type: Article

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