Resonance characteristics of micro cantilever in liquid

Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference

Volumn 1998-July, Issue , 1998, Pages 89-90

  Hirai, Y ^a   Mori, R ^a   Kikuta, H ^a   Kato, N ^a   Inoue, K ^b   Tanaka, Y ^a  

^a Osaka Prefecture University   (Japan)

^b OSAKA MUNICIPAL TECHNICAL RESEARCH INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 29144505139     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IMNC.1998.729983     Document Type: Conference Paper

References (4)

1. T. Terasawa, etal., Bull. Japan Soc. of Prec. Engg., 22, 49, 1988.
2. H-Butt, etal., Joumal of Microscopy, 169, 75, 1993.
3. K. Kokubun, etal., Vacuum, 34, 731, 1984.
4. TNakano et al., , to be submitted to Japanese Joumal of Optics.