High-resolution, back-side illuminated monolithic active pixel sensor for low-energy electron imaging

IEEE Transactions on Nuclear Science

Volumn 52, Issue 5 III, 2005, Pages 1745-1754

  Deptuch, Grzegorz ^a,b,c   Dulinski, Wojciech ^b   Caccia, Massimo ^d   Winter, Marc ^e  

^a IEEE   (France)

^b CENTRE DE CALCUL DE L INSTITUT NATIONAL DE PHYSIQUE NUCLEAIRE ET DE PHYSIQUE DES PARTICULES   (France)

^c AGH UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Poland)

^d UNIVERSITY OF INSUBRIA   (Italy)

^e INSTITUT DE RECHERCHES SUBATOMIQUES   (France)

Author keywords

APS; Autoradiography; Back illumination; Beam monitoring; CMOS; Electron microscopy; HPD; Low energy elec trons; Monolithic active pixel sensors; Radiation detectors

Indexed keywords

APS; AUTORADIOGRAPHY; BACK ILLUMINATION; BEAM MONITORING; HPD; LOW ENERGY ELEC-TRONS; MONOLITHIC ACTIVE PIXEL SENSORS;

ALUMINUM FOIL; CMOS INTEGRATED CIRCUITS; ELECTRIC FIELDS; ELECTRON MICROSCOPY; FLUORESCENCE; PHOTODIODES; RADIATION DETECTORS; VLSI CIRCUITS;

SENSORS;

EID: 29144502411     PISSN: 00189499     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNS.2005.856585     Document Type: Article

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