Ellipsometric monitoring during production of multi-layer thin films

Optics InfoBase Conference Papers

Volumn , Issue , 2001, Pages

  Fairman, Philip Sean ^a  

^a CSIRO   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; FIBER OPTIC SENSORS; LIGHT INTERFERENCE; OPTICAL FIBERS;

MULTI-LAYER THIN FILM; OPTICAL THICKNESS;

REFRACTIVE INDEX;

EID: 29144469481     PISSN: None     EISSN: 21622701     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. Frank L. McCrackin, “A fortan program for analysis of ellipsometer measurements”, Technical note 479, NBS (1969).
2. W.H. Press et al, Numerical recipes in C, (Cambridge, 1988), Chap. 10.