Lithographically fabricated optical cavities for refractive index sensing

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 3168-3173

  Adams, Mark ^a   Derose, Guy A ^b   Loncar, Marko ^c   Scherer, Axel ^b  

^a ENSCO INC   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^c HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISTRIBUTED BRAGG GRATINGS; HIGH RESOLUTION LITHOGRAPHY; LASER EMISSION; SPECTRAL CONTROL;

ETCHING; FIBER BRAGG GRATINGS; LASERS; LIGHT EMISSION; PHOTOLITHOGRAPHY; REFRACTIVE INDEX;

OPTICAL MATERIALS;

EID: 29044450722     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2127945     Document Type: Article

References (9)

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