A multivariate statistical analysis of tool parameters to improve an erase failure of a flash memory device

IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Volumn , Issue , 2005, Pages 132-135

  Miwa, Kazuhiro ^a   Watanabe, Kazuhiro ^a   Takeishi, Kumiko ^a   Kobayashi, Toru ^a   Imaoka, Kazunori ^a,b  

^a Non Volatile Technology Development Group   (Japan)

^b Yield Enhancement Group   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FAILURE ANALYSIS; MULTIVARIABLE CONTROL SYSTEMS; STATISTICAL METHODS;

STATISTICAL MODELING; TOOL PARAMETER;

FLASH MEMORY;

EID: 28744459254     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/issm.2005.1513316     Document Type: Conference Paper

References (2)

1. J. Whittaker, "Graphical models in multivariate statistics ", John Wiley and Sons (1990).
2. K. L. Wuensch, "Multiple R2 and Partial Correlation/ Regression Coefficients, Statistics Lessons", 2001, http://core.ecu.edu/psyc/wuenschk/ StatsLessons.htm