Synthesis of YSZ film by solid single source PE-MOCVD method and characterization

Gaodeng Xuexiao Huaxue Xuebao/Chemical Journal of Chinese Universities

Volumn 26, Issue 11, 2005, Pages 1981-1985

  Liu, Ming Fei ^a   Jiang, Yin Zhu ^a   Gao, Jian Feng ^a   Wang, Yan Yan ^a   Meng, Guang Yao ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Chemical vapor deposition; Film; Microwave plasma; Solid electrolyte; Yttria stabilized zirconia (YSZ)

Indexed keywords

EID: 28744458136     PISSN: 02510790     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)