Scrubber-induced substrate cracks found by data mining analysis

IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Volumn , Issue , 2005, Pages 257-259

  Hirano, Yori ^a,b   Shindo, Wataru ^a   Ono, Ryota ^a   Kitou, Mitsuru ^a   Yamaura, Takamichi ^a   Satou, Fumio ^a   Imaoka, Kazunori ^a  

^a Spansion Japan Limited ^*  (Japan)

^b Yield Enhancement Group   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CLEANING; CRACK PROPAGATION; SCRUBBERS; SILICON;

PRE-FILTERING APPROACH; SCRUBBER TOOL; SILICON SUBSTRATE;

DATA MINING;

EID: 28744451110     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/issm.2005.1513350     Document Type: Conference Paper

References (3)

1. Classification and Regression Trees, 1984, L. Breiman, J.H. Friedman, R.A. Olsen, C.J. Stone, Pacific Grove, Wadsworth.
2. R. Kittler, and W. Wang, 2000, Data Mining for Yield Improvements, Proceedings from MASM 2000.
3. SAS Institute Inc., 1999, SAS Institute White Paper: "Finding the Solution to Data Mining", Cary, NC: SAS Institute Inc.