Industry study on issues of MEMS reliability and accelerated lifetime testing

IEEE International Reliability Physics Symposium Proceedings

Volumn , Issue , 2005, Pages 312-316

  Fung, Clifford ^a  

^a MEMS Industry Group   (United States)

Author keywords

Accelerated lifetime testing; ALT; Failure modes; MEMS; Reliability

Indexed keywords

ACCELERATED LIFETIME TESTING; ALT; FAILURE MODES; MEMS;

ELECTRIC INDUSTRY; PRODUCT DEVELOPMENT; RELIABILITY; SURVEYS; TECHNICAL PRESENTATIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 28744447283     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. The METRIC 2003 Conference on MEMS Reliability - Annual conference of the MEMS Industry Group member companies, Pittsburgh, PA, September 18-19, 2003
2. The METRIC 2004 Conference on Accelerated Lifetime Testing - Annual conference of the MEMS Industry Group member companies, Pittsburgh, PA, September 29-30, 2004