Accelerating aging failures in MEMS devices

IEEE International Reliability Physics Symposium Proceedings

Volumn , Issue , 2005, Pages 317-324

  Tanner, Danelle M ^a   Walraven, Jeremy A ^a   Dugger, Michael T ^a   Parson, Ted B ^a   Candelaria, Sam A ^a   Jenkins, Mark W ^a   Corwin, Alex D ^a   Ohlhausen, James A ^a   Huffman, Elizabeth M ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

MEMS; MEMS accelerated life tests; MEMS dormant storage; VSAM degradation

Indexed keywords

MEMS; MEMS ACCELERATED LIFE TESTS; MEMS DORMANT STORAGE; VSAM DEGRADATION;

ADHESION; ATMOSPHERIC HUMIDITY; CANTILEVER BEAMS; COATING TECHNIQUES; ELECTROSTATICS; FAILURE ANALYSIS; STRESS ANALYSIS; VAPOR DEPOSITION;

MICROELECTROMECHANICAL DEVICES;

EID: 28744437615     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

1. U. Srinivasan, M.R. Houston, R.T. Howe and R. Maboudian, "Alkyltrichlorisilane-Based Self-Assembled Monolayer Films for Stiction Reduction in Silicon Micromachines," J. Microelectromechanical Systems 7 (1998) pp. 252-260
2. G.J. Kluth, M. Sander, M.M. Sung and R. Maboudian, "Study of the Desorption Mechanism of Alkylsiloxane Self-Assembled Monolayers Through Isotopic Labeling and High Resolution Electron Energy-Loss Spectroscopy Experiments," J. Vacuum Sci. and Technol. A16 (1998), pp. 932-936.
3. M.T. Dugger, R.J. Hohlfelder and D.E. Peebles, "Degradation of Monolayer Lubricants for MEMS," Proc. SPIE - The International Society for Optical Engineering, 4980 (2003) pp. 138-150.
4. M. G. Hankins, P. J. Resnick, P. J. Clews, T. M. Mayer, D. R. Wheeler, D. M. Tanner, and R. A. Plass, "Vapor deposition of amino-functionalized self-assembled monolayers on MEMS," Proceedings of the SPIE - The International Society for Optical Engineering, 2003; V4980, pp. 238-47.
5. S. T. Patton, W. D. Cowan, K. C. Eapen, and J. S. Zabinski, "Effect of surface chemistry on the tribological performance of a MEMS electrostatic lateral output motor," Tribology Letters, 2001; V9, No. 3-4, pp. 199-209.
6. H. W. Liu and B. Bhushan, "Adhesion and friction studies of microelectromechanical systems/nanoelectromechanical systems materials using a novel microtriboapparatus," Journal of Vacuum Science & Technology, 2003; V21, No.4, pp. 1528-1538.
7. S. Barnes, S. Miller, S. Rodgers, and F. Bitsie, "Torsional Ratcheting Actuating System," Inter. Conf. On Modeling and Simulation of Microsystems, San Diego, CA, March 2000, pp. 273-276.
8. D. M. Tanner, J. A. Walraven, S. S. Mani, and S. E. Swanson, "Pin-Joint Design Effect on the Reliability of a Polysilicon Microengine," Proceedings of IRPS, 2002, pp. 122-129.
9. M. P. de Boer and T. A. Michalske, "Accurate method for determining adhesion of cantilever beams," in Journal of Applied Physics, V 86, No. 2, 15 July 1999, pp. 817-827.
10. J. A. Ohlhausen, et al., "Multivariate statistical analysis of time-of-flight secondary ion mass spectrometry images using AXSIA," in Applied Surface Science. 231-232 (2004) p.230-234.
11. W. Nelson, Accelerated Testing: Statistical Models, Test Plans, and Data Analyses, New York: John Wiley & Sons, 1990, ch. 3, pp. 145-154.