Surface modification of polymeric substrates by plasma-based ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 242, Issue 1-2, 2006, Pages 353-356

  Okuji, S ^a   Sekiya, M ^a   Nakabayashi, M ^a   Endo, H ^b   Sakudo, N ^b   Nagai, K ^c  

^a LINTEC CORPORATION   (Japan)

^b KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

^c MEIJI UNIVERSITY   (Japan)

Author keywords

Plasma based ion implantation; Surface modification of polymers

Indexed keywords

DIFFUSION; ION IMPLANTATION; MICROCRACKS; PLASMAS; STRESS ANALYSIS; SURFACE TREATMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

LARGE-AREA PROCESSING; PLASMA-BASED ION IMPLANTATION; POLYMERIC SUBSTRATES; SURFACE MODIFICATION OF POLYMERS;

POLYMERS;

EID: 28544448892     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.08.153     Document Type: Conference Paper

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