Size dependent epitaxial cluster deposition: The effect of deposition energy

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 242, Issue 1-2, 2006, Pages 161-163

  Meinander, K ^a   Nordlund, K ^a   Keinonen, J ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

Author keywords

Clusters; Deposition process; Epitaxy; Molecular dynamics

Indexed keywords

HEAT TREATMENT; ION IMPLANTATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON COMPOUNDS; SYNTHESIS (CHEMICAL); TIN COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

COARSENING; DIRECT RELATED LUMINESCENCE; SN NANOSTRUCTURES;

NANOSTRUCTURED MATERIALS;

EID: 28544444859     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.08.028     Document Type: Conference Paper

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