Shape modifications of self-organised colloidal silica nanomasks on silicon

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 242, Issue 1-2, 2006, Pages 167-169

  Lindner, J K N ^a   Gehl, B ^a   Stritzker, B ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

Author keywords

Colloidal silica; Ion beam induced viscous flow; Minimum surfaces; Nanomasks; Self organisation; Sputter erosion

Indexed keywords

ION IMPLANTATION; MASKS; SELF ASSEMBLY; SILICON; SUSPENSIONS (FLUIDS); VISCOUS FLOW;

COLLIDAL SILICA; ION BEAM INDUCED VISCOUS FLOW; MINIMUM SURFACES; NANOMASKS; SELF-ORGANIZATION; SPUTTER EROSION;

NANOSTRUCTURED MATERIALS;

EID: 28544440505     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.08.067     Document Type: Conference Paper

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