Microfactory: Desktop cleanrooms for the production of microsystems

Proceedings of the IEEE International Symposium on Assembly and Task Planning

Volumn 2003-January, Issue , 2003, Pages 18-23

  Verettas, Irene ^a   Clavel, Reymond ^a   Codourey, Alain ^b  

^a EPFL   (Switzerland)

^b CSEM   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLY MACHINES; MEMS; MICROMACHINING;

CLEAN ENVIRONMENT; MICRO ELECTRO MECHANICAL SYSTEM; MICRO-FACTORY; MINIATURIZED SYSTEMS; NEW PROJECTS; WORKING ENVIRONMENT;

MICROSYSTEMS;

EID: 28444460498     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISATP.2003.1217181     Document Type: Conference Paper

References (14)

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