![]() |
Volumn 12, Issue 1, 1996, Pages 108-111
|
Optical investigation of quality improvement of 3C-SiC films after sacrificial oxidation process
a
c
CEA GRENOBLE
(France)
|
Author keywords
[No Author keywords available]
|
Indexed keywords
|
EID: 2842595792
PISSN: 02670836
EISSN: None
Source Type: Journal
DOI: 10.1179/mst.1996.12.1.108 Document Type: Article |
Times cited : (1)
|
References (5)
|