Growth and characterisation of SiC films deposited on a-SiO2/Si (100) substrates

Materials Science and Technology

Volumn 12, Issue 1, 1996, Pages 98-101

  Rodriguez Viejo J ^a   Clavaguera, N ^b   El Felk, Z ^a   Clavaguera Mora, M T ^a   Arnaud, G ^a   Camassel, J ^c   Pascual, J ^a   Berberich, S ^a   Millan J ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b UNIVERSITY OF BARCELONA   (Spain)

^c UNIV MONTPELLIER   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2842568153     PISSN: 02670836     EISSN: None     Source Type: Journal    
DOI: 10.1179/mst.1996.12.1.98     Document Type: Article

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