|
Volumn 21, Issue 3, 1996, Pages 174-176
|
Maskless photoencoded selective etching for glass-based microtechnology applications
a a |
Author keywords
[No Author keywords available]
|
Indexed keywords
|
EID: 2842559037
PISSN: 01469592
EISSN: None
Source Type: Journal
DOI: 10.1364/OL.21.000174 Document Type: Article |
Times cited : (10)
|
References (3)
|