Design of infrared wavelength-selective microbolometers using planar multimode detectors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5836, Issue , 2005, Pages 549-557

  Han, Sang Wook ^a   Neikirk, Dean P ^a  

^a The University of Texas at Austin   (United States)

Author keywords

Focal plane array; Infrared detector; Microbolometer; Wavelength selectivity

Indexed keywords

ANTENNAS; BANDWIDTH; INFRARED DETECTORS; LITHOGRAPHY; MATHEMATICAL MODELS; TUNING;

FOCAL PLANE ARRAY; MICROBOLOMETER; WAVELENGTH SELECTIVITY;

BOLOMETERS;

EID: 28344446676     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.608698     Document Type: Conference Paper

References (10)

1. 0.67As double and triple-coupled quantum well infrared photodetectors", High Performance Electron Devices for Microwave and Optoelectronic Applications, 1999, EDMO, pp. 119-124, Symposium on 22-23 Nov. 1999.
2. Zhengmao Ye et al, "A Normal-incidence InAs self-assembled quantum-dot infrared photodetectors with a high detectivity", IEEE Journal of Quantum Electronics, vol. 38, Issue 9, pp. 1234-1237, Sept. 2002.
3. H. Hara, N. Kishi, and H. Iwaoka, "Silicon bolometer and micro variable infrared filter for CO2 measurement", Optical MEMS, 2000 IEEE/LEOS International Conference, pp. 139-140, 21-24 Aug. 2000.
4. Thomas R. Schimert et al, "Low-cost low-power uncooled 120×160 a-Si-based microinfrared camera for law enforcement applications", Proc. SPIE, vol. 4232, pp. 187-194, Feb. 2001.
5. S. J. Yoo, Micromachined wavelength selective microbolometer sensors operating at room temperature, PhD. Dissertation, The University of Texas at Austin, Dec. 2000.
6. J. W. Kim and D. P. Neikirk, "Infrared wavelength selective micromachined microbolometers," Proc. of SPIE, vol. 5116 Smart Sensors, Actuators, and MEMS, SPIE's First International Symposium on Microtechnologies for the New Millennium 2003, Maspalomas, Gran Canaria (Canary Islands), Spain, May 19-21, 2003, pp. 514-522.
7. D. B. Rutledge and S. E. Schwarz, "Planar multimode detector arrays for infrared and millimeter-wave applications," IEEE Journal of Quantum Electronics, vol. QE-17, no. 3, pp. 407-414, Mar. 1981.
8. R. L. Eisenhart and P. J. Khan, "Theoretical and experimental analysis of a waveguide mounting structure," IEEE Trans. Microwave Theory Tech.,vol. MTT-19, pp. 706-719, Aug. 1971.
9. D. M. Pozar, Microwave Engineering, Addison-Wesley, 1993.
10. Y. Rahmat-Samii and E. Michielssen, Electromagnetic Optimization by Genetic Algorithms, New York, John Wiley & Sons, 1999.