Damage profiles in LiNbO3 by low-energy H+ implantation

Radiation Effects and Defects in Solids

Volumn 159, Issue 5, 2004, Pages 309-314

  Lu, Fei ^a   Hu, Hui ^a   Chen, Feng ^a   Wang, Xue Lin ^a   Wang, K E Ming ^a  

^a SHANDONG UNIVERSITY   (China)

Author keywords

Damage profile; Implantation; Lithium niobate (LiNbO3)

Indexed keywords

BACKSCATTERING; COMPUTER SIMULATION; OPTICAL WAVEGUIDES; OXIDES; THERMAL EFFECTS;

DAMAGE PROFILE; IMPLANTATION;

LITHIUM NIOBATE;

EID: 28344444553     PISSN: 10420150     EISSN: 10294953     Source Type: Journal    
DOI: 10.1080/10420150410001670279     Document Type: Article

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