Optimization of high tunability barium strontium titanate thin films grown by RF magnetron sputtering

IEEE International Symposium on Applications of Ferroelectrics

Volumn , Issue , 2005, Pages 278-280

  Pervez, Nadia K ^a   Hansen, Peter J ^a   York, Robert A ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM STRONTIUM TITANATE; ELECTRODE LOSS; STOICHIOMETRIC FILMS; TUNABILITY;

BARIUM COMPOUNDS; ELECTRIC BREAKDOWN; MAGNETRON SPUTTERING; PERMITTIVITY; THIN FILMS; VARACTORS;

FILM GROWTH;

EID: 28144450115     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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3. J. Im, O. Auciello, S. K. Streiffer, Thin Solid Films 413 243 (2002).
4. A. S. Nagra and R. A. York, IEEE Tran. Microwave Theory Tech. 49, 1705 (1999).
5. S. Stemmer, S. K. Streiffer, N. D. Browning, and A. I. Kingon, Appl. Phys. Lett. 74, 2432 (1999).