Design, integration and characterization of PZT tunable FBAR

IEEE International Symposium on Applications of Ferroelectrics

Volumn , Issue , 2005, Pages 29-32

  Zinck, Christophe ^a   Emmanuel, Defay ^a   Volatier, Alexandre ^b   Caruyer, Gregory ^b   Tanon, Denis Pellissier ^b   Figuiere, Laurent ^b  

^a CEA GRENOBLE   (France)

^b STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC PROPERTIES; FILM BULK ACOUSTIC RESONATORS (FBAR); FREQUENCY RESONANCE; PARALLEL RESONANCE;

ELECTROMECHANICAL DEVICES; FERROELECTRICITY; FREQUENCIES; PIEZOELECTRIC DEVICES; REACTIVE ION ETCHING; RESONANCE; SILICON;

ACOUSTIC RESONATORS;

EID: 28144432007     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)