Wide band frequency and in situ characterization of high permittivity insulators (high-k) for high-speed integrated passives

Microelectronic Engineering

Volumn 82, Issue 3-4 SPEC. ISS., 2005, Pages 548-553

  Lacrevaz, T ^a,b   Flechet B ^b   Farcy, A ^a   Torres, J ^a   Gros Jean, M ^a   Bermond, C ^b   Cueto, O ^c   Blampey, B ^b   Angenieux G ^b   Piquet, J ^b   De Crecy F ^c  

^a STMICROELECTRONICS   (France)

^b UNIVERSITÉ DE SAVOIE   (France)

^c CEA LETI   (France)

Author keywords

Characterization; Coplanar wave guide; Dielectrics; High frequency; High k; K value

Indexed keywords

CHARACTERIZATION; COPPER; DIELECTRIC MATERIALS; DIELECTRIC RELAXATION; ELECTRIC INSULATORS; ELECTRIC LINES; PERMITTIVITY; WAVEGUIDES;

COPLANAR WAVE GUIDES; HIGH FREQUENCY; HIGH-K; K-VALUES;

FREQUENCIES;

EID: 28044469040     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2005.07.054     Document Type: Conference Paper

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