Analysis of charge, mass and energy of large gas cluster ions and applications for surface processing

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 241, Issue 1-4, 2005, Pages 599-603

  Swenson, D R ^a  

^a Epion Corporation   (United States)

Author keywords

Cluster charge; Cluster energy; Cluster mass; Cluster atom collisions

Indexed keywords

ATOMS; CHARGE TRANSFER; COLLIDING BEAM ACCELERATORS; MASS TRANSFER; SURFACE STRUCTURE;

CLUSTER CHARGE; CLUSTER ENERGY; CLUSTER MASS; CLUSTER-ATOM COLLISIONS;

ION BEAMS;

EID: 28044465398     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.07.183     Document Type: Conference Paper

References (9)

1. D.R. Swenson Nucl. Instr. and Meth. B 222 2004 61
2. M.E. Mack, R. Becker, M. Gwinn, D.R. Swenson, R.P. Torti, and R. Roby Proceedings of the 14th International Conference on Ion Implantation Technology, Taos, New Mexico, 2002 2003 IEEE
3. H. Deutsch, K. Becker, and T.D. Märk Int. J. Mass Spectom. Ion Proc. 144 1995 L9
4. J. Farges, M.F. De Feraudy, B. Raoult, and G. Torchet Ber. Bunsenges. Phys. Chem. 88 1984 211
5. J.M. Soler, N. García, O. Echt, K. Sattler, and E. Recknagel Phys. Rev. Lett. 49 1982 1857
6. F. Bottiglioni, J. Coutant, and M. Fois Phys. Rev. A 6 1972 1830
7. B.W. van de Waal J. Chem. Phys. 90 1989 3407
8. P. Slavíček, R. Kalus, P. Paška, I. Odvárková, P. Hobza, and A. Malijevský J. Chem. Phys. 119 2003 2102
9. J.F. Ziegler, J.P. Biersack, computer program "SRIM-2003-20". Available from: (2003).