Transmission EELS attachment for SEM

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

Volumn , Issue , 2005, Pages 298-301

  Khursheed, A ^a   Luo, T ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CARBON; ELECTRON MICROSCOPES; ENERGY DISPERSIVE SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

CARBON FILMS; ELEMENTAL ANALYSIS; FIELD EMISSION; SCANNING TRANSMISSION ELECTRON MICROSCOPES (STEM);

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 28044458922     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. R. Brydson, Electron Energy Loss Spectroscopy, Oxford, U.K.:BIOS Scientific Publishers, 2001.
2. A. Khursheed, N. Karuppiah, M. Osterberg, and J. Thong, "Add-on transmission attachments for the scanning electron microscope", Rev. of Sci. Instrum., Vol. 74, pp. 134-140, 2003.
3. R. F. Egerton, Electron Energy-Loss Spectroscopy in the Electron Microscope, 2nd ed, New York, U.S.A.: Plenum Press, 1996, pp. 33-35.
4. C. C. Ahn and O. L. Krivanek, EELS Atlas, Warrendale, U.S.A.:Gatan Inc., 1983.