Fracture toughness, hardness and elastic modulus of hydrogenated amorphous carbon films deposited by chemical vapor deposition

Thin Solid Films

Volumn 496, Issue 2, 2006, Pages 481-488

  Michel, M D ^a   Muhlen, L V ^b   Achete, C A ^b   Lepienski, C M ^a  

^a FEDERAL UNIVERSITY OF PARANÁ   (Brazil)

^b FEDERAL UNIVERSITY OF RIO DE JANEIRO   (Brazil)

Author keywords

Amorphous carbon; Elastic modulus; Hardness; Nanoindentation

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; ELASTIC MODULI; FRACTURE TOUGHNESS; HARDNESS; HYDROGENATION;

AMORPHOUS CARBON; DEPTH SENSING INDENTATION; FILM CHIPPING; NANOINDENTATION;

AMORPHOUS FILMS;

EID: 28044455030     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.342     Document Type: Article

References (18)

1. B. Bhushan Diamond Relat. Mater. 8 1999 1985
2. J. Robertson Mater. Sci. Eng., R Rep. 37 2002 129
3. X.L. Peng, and T.W. Clyne Thin Solid Films 312 1998 207
4. A.H. Lettington Carbon 36 1998 555
5. Z. Sun, C.H. Lin, Y.L. Lee, J.R. Shi, B.K. Tay, and X. Shi Thin Solid Films 377 2000 198
6. B.K. Gupta, and B. Bhushan Thin Solid Films 270 1995 391
7. M.F. Doerner, and W.D. Nix J. Mater. Res. 1 1986 601
8. A.C. Fischer-Cripps Vacuum 58 2000 569
9. W.C. Oliver, and G.M. Pharr J. Mater. Res. 7 1992 1564
10. B.R. Lawn, A.G. Evans, and D.B. Marshall J. Am. Ceram. Soc. 63 1980 574
11. J. Malzbender, J.M.J. den Toonder, A.R. Balkenende, and G. de With Mater. Sci. Eng., R Rep. 36 2002 47
12. X. Li, D. Diao, and B. Bhushan Acta Mater. 45 1997 4453
13. J. den Toonder, J. Malzbender, G. de With, and R. Balkenende J. Mater. Res. 17 2002 224
14. B.R. Lawn Fracture of Brittle Solids 1993 Cambridge University Press Cambridge, U.K.
15. G. Capote, and F.L. Freire Jr. Mater. Sci. Eng., B 112 2004 101
16. D.S. Harding, W.C. Oliver, and G.M. Pharr Mater. Res. Soc. Symp. Proc. 356 1995 663
17. R.F. Cook, and G.M. Pharr J. Am. Ceram. Soc. 73 1990 787
18. X. Li, and B. Bhushan Thin Solid Films 315 1998 214