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Volumn 241, Issue 1-4, 2005, Pages 641-644
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Smoothing RF cavities with gas cluster ions to mitigate high voltage breakdown
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Author keywords
Cluster beam; Cluster surface interactions; Kilpatrick limit; RF breakdown
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Indexed keywords
ELECTRIC BREAKDOWN;
ELECTRODES;
ION BEAM ASSISTED DEPOSITION;
ION BEAMS;
SURFACE ROUGHNESS;
SURFACE STRUCTURE;
CLUSTER BEAMS;
CLUSTER-SURFACE INTERACTIONS;
KILPATRICK LIMIT;
RF BREAKDOWN;
NATURAL FREQUENCIES;
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EID: 28044436938
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nimb.2005.07.107 Document Type: Conference Paper |
Times cited : (10)
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References (8)
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