Residual stress in the GaN epitaxial film prepared by in situ SiNx deposition

Wuli Xuebao/Acta Physica Sinica

Volumn 54, Issue 11, 2005, Pages 5450-5454

  Qin, Qi ^a   Yu, Nai Sen ^a   Guo, Li Wei ^a   Wang, Yang ^a   Zhu, Xue Liang ^a   Chen, Hong ^a   Zhou, Jun Ming ^a  

^a INSTITUTE OF PHYSICS   (China)

Author keywords

GaN; In situ SiNx deposition; Photoluminescence; Raman; Residual stress

Indexed keywords

EID: 27944484494     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (24)