Three dimensional single crystalline force sensor by porous Si micromachining

Proceedings of IEEE Sensors

Volumn 1, Issue , 2004, Pages 501-504

  Adam M ^c   Vazsonyi E ^a   Barsony I ^a   Vesarhelyi G ^b   Ducso Cs ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b PÁZMÁNY PÉTER CATHOLIC UNIVERSITY   (Hungary)

^c NONE

Author keywords

3D force sensor; Porous Si micromachining; Tactile sensing

Indexed keywords

MICROMACHINING; MULTILAYERS; POLYCRYSTALLINE MATERIALS; RESISTORS; SEMICONDUCTOR DOPING; SILICON; SINGLE CRYSTALS;

3D FORCE SENSOR; POROUS SI MICROMACHINING; TACTILE SENSING;

SENSORS;

EID: 27944483744     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Lin Wang, David J. Beebc, "A silicon-based shear force sensor: development and characterization" Sensors and Actuators 84 (2000) pp. 33-44
2. B. J. Kane, M. R. Cutkosky, G. T. A. Kovacs, "A Traction Stress Sensor Array for Use in High-Resolution Robotic Tactile Imaging", Journal of Microelectromechanical Systems, Vol. 9, No. 4, pp. 425-434., 2000
3. Zs. Vizváry, P. Fürjes, M. Ádám, Cs. Dücsö and I. Bársony: "Mechanical Modelling of an Integrable 3D Force Sensor by Silicon Micromachining", Proceedings of MME 2002, Sinaia (2002) 165-168
4. Shimojo, M., "Spatial Filtering Characteristic of Elastic Cover for Tactile Sensor", IEEE Int. Conf. on Robotics and Automation, pp. 287-292, San Diego, CA. May 8-13, 1994
5. Johnson, K. L., "Contact Mechanics", Cambridge University Press 1985.