Shape change of SiGe islands with initial Si capping

Applied Physics Letters

Volumn 87, Issue 22, 2005, Pages 1-3

  Wu, Y Q ^a   Li, F H ^a   Cui, J ^a   Lin, J H ^a   Wu, R ^a   Qin, J ^a   Zhu, C Y ^a   Fan, Y L ^a   Yang, X J ^a   Jiang, Z M ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; GERMANIUM COMPOUNDS; MORPHOLOGY; SILICON; THERMODYNAMICS;

ATOMIC PROCESSES; SELF-ASSEMBLED GESI ISLANDS; SI CAPPING; THERMODYNAMIC PROCESS;

SELF ASSEMBLY;

EID: 27944474283     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2137307     Document Type: Article

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