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Volumn 44, Issue 32, 2005, Pages 6857-6860
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Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography
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Author keywords
[No Author keywords available]
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Indexed keywords
FIBER OPTICS;
MICROPROCESSOR CHIPS;
OPTICAL DESIGN;
OPTICAL FIBERS;
PHOTOLITHOGRAPHY;
PHOTORESISTS;
ALIGNMENT STRUCTURES;
COUPLING LOSS;
DEEP-UV LITHOGRAPHY;
FIBER RESONATORS;
OPTICAL RESONATORS;
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EID: 27944462273
PISSN: 1559128X
EISSN: 15394522
Source Type: Journal
DOI: 10.1364/AO.44.006857 Document Type: Article |
Times cited : (17)
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References (10)
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