Novel gas sensors based on thin film bulk acoustic resonators

Proceedings of IEEE Sensors

Volumn 3, Issue , 2004, Pages 1504-1505

  Reichl, W ^a   Runck, J ^a   Schreiter, M ^b   Green, E ^c   Gabl, R ^b  

^a E+E Elektronik GesmbH ^*  (Austria)

^b SIEMENS AG   (Germany)

^c UNIVERSITY OF BATH   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; MICROSENSORS; QUARTZ; SILICON; SUBSTRATES; THIN FILMS; ZINC OXIDE;

GAS SENSITIVE POLYMER RECEPTORS; SILICON SUBSTRATES; THICKNESS DEPENDENT SELECTIVITY;

CHEMICAL SENSORS;

EID: 27944454840     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)