Evaluation of residual stress in thin ferroelectric films using grazing incident X-ray diffraction

Integrated Ferroelectrics

Volumn 63, Issue , 2004, Pages 183-189

  Petrov, Peter Kr ^a   Sarma, Kumaravinothan ^a   Alford, Neil McN ^a  

^a LONDON SOUTH BANK UNIVERSITY   (United Kingdom)

Author keywords

Barium strontium titanate; Grazing incidence X ray diffraction; In plane residual strain

Indexed keywords

PULSED LASER DEPOSITION; RESIDUAL STRESSES; STRONTIUM COMPOUNDS; SUBSTRATES; X RAY DIFFRACTION;

BARIUM STRONTIUM TITANATE; GRAZING INCIDENCE X-RAY DIFFRACTION; IN PLANE RESIDUAL STRAINS;

FERROELECTRIC THIN FILMS;

EID: 27944439081     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580490459431     Document Type: Article

References (8)

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5. W. Wong-Ng et al., NBC (USA), ICDD Grant-in-Aid (1988).
6. K. F. Astafiev, private correspondence.
7. P. K. Petrov et al., Paper presented on ISIF-15, 2003, will be published in Integrated Ferroelectrics.
8. The φ-scan patterns are not presented in this paper. They can be found in [7].