Fabrication and initial characterisation results of a micromachined biomimetic strain sensor inspired from the campaniform sensillum of insects

Proceedings of IEEE Sensors

Volumn 2, Issue , 2004, Pages 542-545

  Wicaksono, D H B ^a   Pandraud, G ^a   Craclun, G ^a   Vincent, J F V ^b   French, P J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b University of Bath   (United Kingdom)

Author keywords

Biomimetic sensor; Campaniform sensillum; MEMS

Indexed keywords

BIOMIMETIC MATERIALS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL SYSTEMS; SILICON; STRAIN MEASUREMENT;

BIOMIMETIC SENSORS; COMPANIFORM SENSILLIUM; MEMS; STRAIN SENSORS;

SENSORS;

EID: 27944438538     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. S.N. Zill, E-A. Seyfarth, "Exoskeletal Sensors for Walking", Scientific American, July 1996, pp. 70-74.
2. A. Skordos, P.H. Chan, J.F.V. Vincent, and G. Jeronimidis, "A novel strain sensor based on the campaniform sensillum of insects", Phil. Trans. R. Soc. Lond. A. Vol 360, pp. 239-253, 2002.
3. D.H.B. Wicaksono, G. Pandraud, G. Craciun, J.F.L. Goosen, W.A. van Duyl, J.F.V. Vincent, and P.J. French, Design and Preliminary Fabrication of a New Micromachined Silicon Strain Sensor based on the Campaniform Sensillum of Insects. Proceeding of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT MNT2004). Vol. 3-1. pp. 437-442. Sapporo, Japan, 4-7 July 2004
4. D.H.B. Wicaksono, P.J. French, Semiquantitative Modelling of a Biomimetic Micromechanical Structure's Optical Characterisation Results Based on Ideal Fabry-Perot Interferometer Equation. A talk at Indonesian Applied Mathematics Society in Nederland's Meeting 2004. Delft 2004.