Real-time diagnostics for metalorganic vapor phase epitaxy

Physica Status Solidi (B) Basic Research

Volumn 242, Issue 13, 2005, Pages 2551-2560

  Aspnes, D E ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 27844558726     PISSN: 03701972     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssb.200541109     Document Type: Conference Paper

References (18)

1. G. B. Stringfellow, Organometallic Vapor-Phase Epitaxy: Theory and Practice (Academic, New York, 1999).
2. J.-T. Zettler, Prog. Cryst. Growth Charact. Mater. 35, 27 (1997).
3. D. E. Aspnes, J. Vac. Sci. Technol. A 14, 960 (1996).
4. Proceedings of the Third International Conference on Spectroscopic Ellipsometry, edited by M. Fried, K. Hingerl, and J. Humlicék, published as Vol. 455-456 of Thin Solid Films (2004).
5. H. G. Tompkins and E. A. Irene (eds.), Handbook of Ellipsometry (Springer-Verlag, Heidelberg, 2005).
6. J. Opsal, H. Chu, Y. Wen, Y. C. Chang, and G. Li, Proc. SPIE 4689, 183 (2002).
7. The International Technology Roadmap for Semiconductors can be accessed at http://public.itrs.net.
8. J. Opsal, private communication. The relevant figure is published in Ref. [9].
9. D. E. Aspnes, in: Ref. [4], p. 3.
10. P. P. Ewald, Dissertation, (Munich, 1912);
11. A nn. Phys. 49, 1 (1916).
12. C. W. Oseen, Ann. Phys. 48, 1 (1915).
13. D. E. Aspnes and J. Lau, U.S. Patent No. 6, 181, 421, issued 30 Jan. 2001.
14. K. Ebert and D. E. Aspnes, in: Ref. [4], p. 779.
15. M. Berek, Zbl. Miner. Geol. Paläont. 388, 427, 464, 580 (1913).
16. T. Mori and D. E. Aspnes, in: Ref. [4], p. 33.
17. S. Kim, K. L. Flock, M. Asar, I. K. Kim, and D. E. Aspnes, J. Vac. Sci. Technol. B 22, 2233 (2004).
18. K. Möller, Z. Kollonitsch, Ch. Giesen, M. Heuken, F. Willig, and T. Hannappel, J. Cryst. Growth 248, 244 (2003).