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Volumn 44, Issue 29, 2005, Pages 6176-6180

Ion-assisted sputtering deposition of antireflection film coating for flexible liquid-crystal display applications

Author keywords

[No Author keywords available]

Indexed keywords

LIQUID CRYSTAL DISPLAYS; MAGNETRON SPUTTERING; MORPHOLOGY; NIOBIUM COMPOUNDS; OPTICAL PROPERTIES; SILICA;

EID: 27844535227     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.44.006176     Document Type: Review
Times cited : (32)

References (13)
  • 6
    • 21344483325 scopus 로고
    • Influence of the plasma on substrate heating during low-frequency reactive sputtering of AIN
    • D. A. Glocker, "Influence of the plasma on substrate heating during low-frequency reactive sputtering of AIN," J. Vac. Sci. Technol. A 11, 2989-2993 (1993).
    • (1993) J. Vac. Sci. Technol. A , vol.11 , pp. 2989-2993
    • Glocker, D.A.1
  • 8
    • 0036542846 scopus 로고    scopus 로고
    • 5 thin films deposited by ion-beam sputtering
    • 5 thin films deposited by ion-beam sputtering," Appl. Opt. 41, 2043-2047 (2002).
    • (2002) Appl. Opt. , vol.41 , pp. 2043-2047
    • Lee, C.-C.1    Tien, C.-L.2    Hsu, J.-C.3
  • 9
    • 0041649887 scopus 로고    scopus 로고
    • Single- And dual-ion-beam sputter deposition of titanium oxide films
    • J.-C. Hsu and C.-C. Lee, "Single- and dual-ion-beam sputter deposition of titanium oxide films," Appl. Opt. 37, 1171-1176 (1998).
    • (1998) Appl. Opt. , vol.37 , pp. 1171-1176
    • Hsu, J.-C.1    Lee, C.-C.2
  • 10
    • 0021374868 scopus 로고
    • Ion-assisted deposition of optical thin films: Low-energy vs. high-energy bombardment
    • J. R. McNeil, A. C. Barron, S. R. Wilson, and W. C. Herrmann, Jr., "Ion-assisted deposition of optical thin films: low-energy vs. high-energy bombardment," Appl. Opt. 23, 552-556 (1984).
    • (1984) Appl. Opt. , vol.23 , pp. 552-556
    • McNeil, J.R.1    Barron, A.C.2    Wilson, S.R.3    Herrmann Jr., W.C.4
  • 11
    • 0025556802 scopus 로고
    • Use of ion beam assisted deposition to modify the microstructure and properties of thin films
    • F. A. Smidt, "Use of ion beam assisted deposition to modify the microstructure and properties of thin films," Int. Mater. Rev. 35, 61-66 (1990).
    • (1990) Int. Mater. Rev. , vol.35 , pp. 61-66
    • Smidt, F.A.1
  • 12
    • 12744255036 scopus 로고    scopus 로고
    • Power effects in indium zinc oxide thin films for organic light-emitting devices on flexible applications
    • J.-J. Ho and C. Y. Chen, "Power effects in indium zinc oxide thin films for organic light-emitting devices on flexible applications," J. Electrochem. Soc. 152, G57-G61 (2005).
    • (2005) J. Electrochem. Soc. , vol.152
    • Ho, J.-J.1    Chen, C.Y.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.