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Thin Solid Films

Volumn 494, Issue 1-2, 2006, Pages 201-206

Properties of MoNxOy thin films as a function of the N/O ratio

(10) Barbosa, J a Cunha, L a Rebouta, L a Moura, C a Vaz, F a Carvalho, S a Alves, E b Le Bourhis, E c Goudeau, Ph c Riviere J P c

a UNIVERSITY OF MINHO (Portugal)

b INSTITUTO TECNOLÓGICO E NUCLEAR (Portugal)

c UNIVERSITÉ DE POITIERS (France)

Author keywords

Molybdenum oxynitride; Physical vapour deposition

Indexed keywords

AMORPHIZATION; MOLYBDENUM COMPOUNDS; NITROGEN; OXYGEN; PHYSICAL VAPOR DEPOSITION; RESIDUAL STRESSES; STEEL; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

MOLYBDENUM OXYNITRIDE; REACTIVE GASES; STEEL SUBSTRATES;

THIN FILMS;

EID: 27844454879 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.07.192 Document Type: Conference Paper

Times cited : (23)

References (30)

1
- 0032052957
- S.L. Robertson, D. Finello, and R.F. Davies Surf. Coat. Technol. 102 1998 256
- (1998) Surf. Coat. Technol. , vol.102 , pp. 256
- Robertson, S.L.¹ Finello, D.² Davies, R.F.³

2
- 0030072076
- V.P. Anitha, S. Major, D. Chandrashekharam, and Mukesh Bhatnagar Surf. Coat. Technol. 79 1996 50
- (1996) Surf. Coat. Technol. , vol.79 , pp. 50
- Anitha, V.P.¹ Major, S.² Chandrashekharam, D.³ Mukesh, B.⁴

3
- 0033149246
- Jui-Chang Chuang, Shuo-Lun Tu, and Mao-Chie Chen Thin Solid Films 346 1999 299
- (1999) Thin Solid Films , vol.346 , pp. 299
- Jui-Chang, C.¹ Shuo-Lun, T.² Mao-Chie, C.³

4
- 0000510749
- S. Li, and J.S. Lee J. Catal. 173 1998 134
- (1998) J. Catal. , vol.173 , pp. 134
- Li, S.¹ Lee, J.S.²

5
- 0000258983
- S. Li, and J.S. Lee J. Catal. 178 1998 119
- (1998) J. Catal. , vol.178 , pp. 119
- Li, S.¹ Lee, J.S.²

6
- 17544403616
- M. Ürgen, O.L. Eryilmaz, A.F. Cakir, E.S. Kayali, B. Nilüfer, and Y. Isik Surf. Coat. Technol. 94/95 1997 501
- (1997) Surf. Coat. Technol. , vol.94-95 , pp. 501
- Ürgen, M.¹ Eryilmaz, O.L.² Cakir, A.F.³ Kayali, E.S.⁴ Nilüfer, B.⁵ Isik, Y.⁶

7
- 0026887438
- K.W. Kreutz, M. Krosche, H. Sung, and A. Voss Surf. Coat. Technol. 53 1992 57
- (1992) Surf. Coat. Technol. , vol.53 , pp. 57
- Kreutz, K.W.¹ Krosche, M.² Sung, H.³ Voss, A.⁴

8
- 0040347694
- G. Linker, R. Smithey, and O. Meyer J. Phys. F. Met. Phys. 14 1984 L115
- (1984) J. Phys. F. Met. Phys. , vol.14
- Linker, G.¹ Smithey, R.² Meyer, O.³

9
- 0043194291
- Y.G. Shen Mater. Sci. Eng., A 359 2003 158
- (2003) Mater. Sci. Eng., A , vol.359 , pp. 158
- Shen, Y.G.¹

10
- 3843092691
- Yimin Wang, Ray, and Y. Ling Mater. Sci. Eng., B 112 2004 42
- (2004) Mater. Sci. Eng., B , vol.112 , pp. 42
- Wang, Y.¹ Ray² Ling, Y.³

11
- 9644268968
- M. Bereznai, Z. Tóth, A.P. Caricato, M. Fernández, A. Luches, G. Majni, P. Mengucci, P.M. Nagy, A. Juhász, and L. Nánai Thin Solid Films 473 2005 16
- (2005) Thin Solid Films , vol.473 , pp. 16
- Bereznai, M.¹ Tóth, Z.² Caricato, A.P.³ Fernández, M.⁴ Luches, A.⁵ Majni, G.⁶ Mengucci, P.⁷ Nagy, P.M.⁸ Juhász, A.⁹ Nánai, L.¹⁰

12
- 0037375377
- M.K. Kazmanli, M. Ürgen, and A.F. Cakir Surf. Coat. Technol. 167 2003 77
- (2003) Surf. Coat. Technol. , vol.167 , pp. 77
- Kazmanli, M.K.¹ Ürgen, M.² Cakir, A.F.³

13
- 0015672319
- J.D. O'Keefe, and C.H. Skeen J. Appl. Phys. 44 1973 4622
- (1973) J. Appl. Phys. , vol.44 , pp. 4622
- O'Keefe, J.D.¹ Skeen, C.H.²

14
- 27844547265
- B.P. Fairand, B.A. Wilcox, W.J. Gallagher, and D.N. Williams J. Appl. Phys. 64 1993 81
- (1993) J. Appl. Phys. , vol.64 , pp. 81
- Fairand, B.P.¹ Wilcox, B.A.² Gallagher, W.J.³ Williams, D.N.⁴

15
- 0018674975
- D.B. Dabyburjor, S.S. Jewar, and E. Ruckenstien Catal. Rev., Sci. Eng. 19 1979 293
- (1979) Catal. Rev., Sci. Eng. , vol.19 , pp. 293
- Dabyburjor, D.B.¹ Jewar, S.S.² Ruckenstien, E.³

16
- 0034618177
- A. Larrubia, G. Ramis, and G. Busca Appl. Catal., B Environ. 27 2000 L145
- (2000) Appl. Catal., B Environ. , vol.27
- Larrubia, A.¹ Ramis, G.² Busca, G.³

17
- 2542501929
- S.S. Sunu, E. Prabhu, V. Jayaraman, K.I. Gnanasekar, T.K. Seshagiri, and T. Gnanasekaran Sens. Actuators, B 101 2004 161
- (2004) Sens. Actuators, B , vol.101 , pp. 161
- Sunu, S.S.¹ Prabhu, E.² Jayaraman, V.³ Gnanasekar, K.I.⁴ Seshagiri, T.K.⁵ Gnanasekaran, T.⁶

18
- 0000362480
- C. Sayag, G. Bugli, P. Havil, and G. Djéga-Mariadassou J. Catal. 167 1997 372
- (1997) J. Catal. , vol.167 , pp. 372
- Sayag, C.¹ Bugli, G.² Havil, P.³ Djéga-Mariadassou, G.⁴

19
- 0346674387
- Thierry Bécue, Jean-Marie Manoli, Claude Potvin, and Gérald Djéga-Mariadassou J. Catal. 170 1997 123
- (1997) J. Catal. , vol.170 , pp. 123
- Thierry, B.¹ Jean-Marie, M.² Claude, P.³ Gérald, D.⁴

20
- 0036351493
- P. Perez-Romo, C. Potvin, J.-M. Manoli, and G. Djéga-Mariadassou J. Catal. 208 2002 187
- (2002) J. Catal. , vol.208 , pp. 187
- Perez-Romo, P.¹ Potvin, C.² Manoli, J.-M.³ Djéga-Mariadassou, G.⁴

21
- 0036723204
- Y.G. Shen, and Yiu-Wing Mai Mater. Sci. Eng., B 95 2002 222
- (2002) Mater. Sci. Eng., B , vol.95 , pp. 222
- Shen, Y.G.¹ Yiu-Wing, M.²

22
- 0022075813
- L.R. Doolittle Nucl. Instrum. Methods, B 9 1985 344
- (1985) Nucl. Instrum. Methods, B , vol.9 , pp. 344
- Doolittle, L.R.¹

23
- 0000073841
- G.G. Stoney Proc. R. Soc. Lond., A 82 1909 172
- (1909) Proc. R. Soc. Lond., A , vol.82 , pp. 172
- Stoney, G.G.¹

24
- 0036146472
- F. Vaz, L. Rebouta, P. Goudeau, J.P. Rivière, M. Bodmann, G. Kleer, and W. Döll Thin Solid Films 402 2002 195
- (2002) Thin Solid Films , vol.402 , pp. 195
- Vaz, F.¹ Rebouta, L.² Goudeau, P.³ Rivière, J.P.⁴ Bodmann, M.⁵ Kleer, G.⁶ Döll, W.⁷

25
- 0031074320
- M. Kharrazi, A. Azen, L. Kullman, and C.G. Granqvist Thin Solid Films 295 1997 117
- (1997) Thin Solid Films , vol.295 , pp. 117
- Kharrazi, M.¹ Azen, A.² Kullman, L.³ Granqvist, C.G.⁴

26
- 0017943225
- H. Jehn, and P. Ettmayer J. Less-Common Met. 58 1978 85
- (1978) J. Less-Common Met. , vol.58 , pp. 85
- Jehn, H.¹ Ettmayer, P.²

27
- 23544480876
- A.J. Perry, A.W. Baouchi, J.H. Petersen, and S.D. Pozder Surf. Coat. Technol. 54/55 1992 261
- (1992) Surf. Coat. Technol. , vol.54-55 , pp. 261
- Perry, A.J.¹ Baouchi, A.W.² Petersen, J.H.³ Pozder, S.D.⁴

28
- 0022146078
- L. Volpe, and M. Boudart J. Solid State Chem. 59 1985 332
- (1985) J. Solid State Chem. , vol.59 , pp. 332
- Volpe, L.¹ Boudart, M.²

29
- 0012473203
- S.L. Robertson, D. Finello, and R.F. Davis Mater. Sci. Eng., A 248 1998 198
- (1998) Mater. Sci. Eng., A , vol.248 , pp. 198
- Robertson, S.L.¹ Finello, D.² Davis, R.F.³

30
- 0037666382
- P. Hones, N. Martin, M. Regula, and F. Lévy J. Phys. D: Appl. Phys. 36 2003 1023
- (2003) J. Phys. D: Appl. Phys. , vol.36 , pp. 1023
- Hones, P.¹ Martin, N.² Regula, M.³ Lévy, F.⁴

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