Photochemical template removal and spatial patterning of zeolite MFI thin films using UV/ozone treatment

Microporous and Mesoporous Materials

Volumn 87, Issue 1, 2005, Pages 45-51

  Li, Qinghua ^a   Amweg, Meri L ^a   Yee, Chanel K ^a   Navrotsky, Alexandra ^a   Parikh, Atul N ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Calcination; Ellipsometric imaging; Microporous thin films; Patterning; UV ozone

Indexed keywords

CALCINATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PHOTOCHEMICAL REACTIONS; SCANNING ELECTRON MICROSCOPY; ZEOLITES;

ELLIPSOMETRIC IMAGING; MICROPOROUS THIN FILMS; PATTERNING; UV/OZONE;

THIN FILMS;

PHOTOCHEMICAL TREATMENT;

EID: 27844452910     PISSN: 13871811     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micromeso.2005.07.048     Document Type: Article

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