Silicon for primary metrology: The effect of hydrogen on its perfection

Journal of Physics D: Applied Physics

Volumn 38, Issue 22, 2005, Pages 4109-4114

  Becker, P ^a   Bettin, H ^a   Kuetgens, U ^a   Hallmann Seiffert, B ^b   Riemann, H ^b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b LEIBNIZ INSTITUTE FOR CRYSTAL GROWTH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MEASUREMENTS; SCATTERING; SILICON; SINGLE CRYSTALS; TOMOGRAPHY;

AVOGADRO CONSTANT; LATTICE PARAMETER; MOLAR VOLUMES; X RAY TOPOGRAPHY;

HYDROGEN;

EID: 27844449898     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/38/22/015     Document Type: Article

References (19)

1. Mills I M, Mohr P J, Quinn T J, Taylor B N and Williams E R 2005 Metrologia 42 71-80
2. Fujii K, Tanaka M, Nezu Y, Nakayama K, Fujimoto H, DeBièvre P and Valkiers S 1999 Metrologia 36 455-64
3. Nakayama K, Fujimoto H, Ishikawa T and Takeno H 2001 IEEE Trans. Instrum. Meas. 50 601-3
4. Dornberger E, Esfandyari J, Vanhellemont J, Gräf D, Lambert U, Dupret F and von Ammon W 1998 The Electrochem. Soc. Proc. 98 490-502
5. Zulehner W 1991 Landolt-Börnstein New Series III/22b ed K H Hellwege and O Madelung (Berlin: Springer) p 396
6. Ogawa T and Nango N 1986 Rev. Sci. Instrum. 57 1135-43
7. Dornberger E, Esfandyari J, Gräf D, Vanhellemont J, Lambert U, Dupret F and von Ammon W 1997 Crystalline Defects and Contamination Control: their Impact and Control in Device Manufacturing II (Paris) ed B O Kolbesen et al (Pennington, NJ: Electrochemical Society) PV 97-22, ISBN 1-56677-175-7
8. Voroncov V V 1982 J. Cryst. Growth 59 625-9
9. Deslattes R D, Kessler E G Jr, Owens S, Black D and Henins A 1999 J. Phys. D: Appl. Phys. 32 A3-7
10. Becker P, Kuetgens U and Stümpel J 2001 IEEE Trans. Instrum. Meas. 50 612-15
11. Wolf E 1982 Phys. Status Solidi a 70 K59-61
12. von Ammon W, Hölzl R, Virbulis J, Dornberger E, Schmolke R and Gräf D 2001 J. Cryst. Growth 226 19-30
13. Martin J 1998 PTB-Report Aph-34, Physikalisch-Technische Bundesanstalt Braunschweig
14. Wolf E, Schröder W, Riemann H and Lux B 1996 Mater. Sci. Eng. B 26 209-12
15. Martin J, Bettin H, Kuetgens U, Schiel D and Becker P 1999 IEEE Trans. Instrum. Meas. 48 216-20
16. Tuomi T, Rantamäki R, McNally P J, Lowney D, Danilewsky A N and Becker P 2001 J. Phys. D: Appl. Phys. 34 A133-5
17. Bettin H and Toth H 2004 Metrologia 41 S52-61
18. Alasia F et al 2002 Proc. Conf. on Precision Electromagnetic Measurements (Ottawa) (Piscataway, NJ: IEEE) pp 558-9 ISBN 0-7803-7243-5
19. Spaepen F and Eliat A 1999 IEEE Trans. Instrum. Meas. 48 230-2