Automatic micro-indentation and inspection system by piezo driven micro robot with multiple inner sensors

IEEE International Conference on Mechatronics and Automation, ICMA 2005

Volumn , Issue , 2005, Pages 83-88

  Fuchiwaki, Ohmi ^a   Tobe, Nobuyuki ^a   Aoyama, Hisayuki ^a   Misaki, Daigo ^b   Usuda, Takashi ^c  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

^b SHIZUOKA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Dead reckoning navigation; Eddy current sensor; Inchworm locomotion; Microscopic operation; Optical mouse device; Piezo element; Self gauging

Indexed keywords

AUTOMATION; EDDY CURRENTS; GAGES; IMAGE ANALYSIS; INDENTATION; MICROSCOPES; NAVIGATION; OPTICAL DEVICES; ROBOTS; SENSORS;

EDDY CURRENT SENSORS; MICROSCOPIC OPERATION; OPTICAL MOUSE DEVICE; PIEZO ELEMENTS; SELF-GAUGING;

CONTROL SYSTEMS;

EID: 27744516169     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. H.Aoyama; Precision Machining and Measurement Organized by Miniature Robots, Proc. of 8th ASPE Meeting, pp. 126 (1993)
2. O. Fuchiwaki and H. Aoyama: Piezo based micro robot for microscope instrument, Proc. of 6th Int. Conference on Macaronis Technology, pp.499-504 (2002).
3. O. Fuchiwaki and H. Aoyama; Flexible Microprocessing Organized by Versatile Microrobots, Proc. of 7th Int. Conference on Macaronis Technology, pp.121-126 (2003).
4. Y.Wakikaido,T.Kawai, S.Kayano, D.Misaki, O.Fuchiwaki, T.Usuda, H. Aoyama; Desktop Micro Drilling and Assembling System by Microrobots-Combination of Global and Local Positioning System-, 4th International Workshop on Microfactories, Vol.1,pp.11-16(2004)
5. Agilent Technologies, Inc: Agilent ADNS-2051 Optical Mouse Sensor Data Sheet, Agilent Technologies web site.