Optical properties of magnetron-sputtered and rolled aluminum

Journal of Applied Physics

Volumn 98, Issue 8, 2005, Pages

  Van Gils, S ^a   Dimogerontakis, Th ^a   Buytaert, G ^a   Stijns, E ^a   Terryn, H ^a   Skeldon, P ^b   Thompson, G E ^b   Alexander, M R ^b  

^a VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

^b UNIVERSITY OF MANCHESTER   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EFFECTIVE-MEDIUM APPROXIMATION; MAGNETRON-SPUTTERED ALUMINUM; OPTICAL CONSTANTS; VISIBLE SPECTROSCOPIC ELLIPSOMETRY;

APPROXIMATION THEORY; ELLIPSOMETRY; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; ROLLING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPECTROSCOPIC ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

ALUMINUM;

EID: 27744487176     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2085315     Document Type: Article

References (40)

1. D. Y. Smith, E. Shiles, and I. Mitio, in Handbook of Optical Constants, edited by, E. D. Palik, (Academic, San Diego, 1998), Vol. 1, p. 369.
2. A. C. Nyce and L. P. Skolnick, J. Opt. Soc. Am. 65, 792 (1975).
3. A. Shinya, Y. Okuno, M. Fukui, and Y. Shintani, Surf. Sci. 371, 149 (1997).
4. C. W. Hollars and R. C. Dunn, Rev. Sci. Instrum. 69, 1747 (1998).
5. D. N. Popov, Tz. K. Kotlarova, Tz. D. Uzunov, and V. N. Gaydarova Vacuum 38, 1015 (1988).
6. H. Gruenwald et al., Surf. Coat. Technol. 111, 287 (1999).
7. M. Fishkis and J. C. Lin, Wear 206, 156 (1997).
8. K. Nisancioglu, J. H. Nordlien, A. Afseth, and G. M. Scamans, Mater. Sci. Forum 331-3, 111 (2000).
9. H. Leth-Olsen, J. H. Nordlien, and K. Nisancioglu, Corros. Sci. 40, 2051 (1998).
10. G. Buytaert, B. Kernig, B. Grzemba, H. J. Engelmann, E. Zschech, and H. Terryn, Proceedings of the Third International Symposium on Aluminium Surface Science and Technology [ATB Metall. 43, 382 (2003).]
11. I. Lindseth, Ph.D. thesis, NTNU Trondheim, Norway, 1965.
12. I. Lindseth and A. Bardal, Proceedings of the Second International Symposium on Aluminium Surface Science and Technology, 2000 [ATB Metall. 40, 35 (2000).]
13. G. Buytaert, H. Terryn, S. Van Gils, B. Kernig, and B. Grzemba, Proceedings of the third International Symposium on Aluminium Surface Science and Technology [ATB Metall. 43, 475 (2003).]
14. S. Van Gils, G. Buytaert, E. Stijns, and H. Terryn, ATB Metall. 42, 8 (2002).
15. A. G. Mathewson and H. P. Myers, J. Phys. F: Met. Phys. 2, 403 (1972).
16. S. Van Gils, P. Mast, E. Stijns, and H. Terryn, Surf. Coat. Technol. 185, 303 (2004).
17. M. Born, and E. Wolf, Principles of Optics, 7th expanded ed. (Cambridge University Press, Cambridge, UK, 1999).
18. K. Wefers and C. Misra, Alcoa Technical Paper. (Alcoa, Banbury, UK, 1987).
19. L. R. Doolittle, Nucl. Instrum. Methods Phys. Res. B 9, 344 (1985).
20. R. C. Furneaux, G. E. Thompson, and G. C. Wood, Corros. Sci. 18, 853 (1978).
21. Handbook of X-ray Photoelectron Spectroscopy, Physical Electronics, edited by, J. Chastain, and, R. C. King, Jr., (Eden Prairie, Minnesota, USA, 1995).
22. J. P. Bojon, N. Hilleret, and K. Weiss, Vacuum 53, 247 (1999).
23. L. Ward, The Optical Constants of Bulk Materials and Thin Films (IOP, Bristol, UK, 1988).
24. L. Mattsson, ATB Metall. 42, 3 (2002).
25. S. Van Gils, S. Holten, E. Stijns, M. Vancaldenhoven, H. Terryn, and L. Mattsson, Surf. Interface Anal. 35, 121 (2003).
26. H. G. Tompkins and W. A. McGahan, Spectroscopic Ellipsometry and Reflectometry (J Wiley, New York, 1999).
27. A. D. Rakic, A. B. Djurisic, J. M. Elazar, and M. L. Majewski, Appl. Opt. 37, 5271 (1998).
28. N. W. Ashcroft and K. Sturm, Phys. Rev. B 3 1898 (1971).
29. F. Gervais, in Handbook of Optical Constants, edited by, E. D. Palik, (Academic, San Diego, 1998), Vol. 2, p. 761.
30. D. A. G. Bruggeman, Ann. Phys. 5, 638 (1935).
31. J. C. M. Garnett, Philos. Trans. R. Soc. London 203, 385 (1904).
32. J. C. M. Garnett, Philos. Trans. R. Soc. London 205, 237 (1904).
33. R. C. Weast, CRC Handbook of Chemistry and Physics, 69th ed. (CRC, Boca Raton, FL, 1988).
34. J. E. Jellison, Jr., Thin Solid Films 234, 416 (1993).
35. D. E. Aspnes, J. B. Theeten, and F. Hottier, Phys. Rev. B 20, 3292 (1979).
36. C. G. Granqvist and O. Hunderi, Phys. Rev. B 16, 3513 (1977).
37. J. M. Walls, in Methods of Surface Analysis: Techniques and Applications, edited by, J. M. Walls, (Cambridge University Press, Cambridge, UK, 1989), p. 6.
38. W. J. Tropf and M. E. Thomas, in Handbook of Optical Constants, edited by, E. D. Palik, (Academic, Boston, 1998).
39. J. Van den Brand, W. G. Sloof, H. Terryn, and J. H. W. de Wit, Surf. Interface Anal. 36, 81 (2004).
40. D. E. Aspnes, Thin Solid Films 89, 249 (1982).