Fast Hartmann-Shack wavefront sensors manufactured in standard CMOS technology

IEEE Sensors Journal

Volumn 5, Issue 5, 2005, Pages 976-982

  De Lima Monteiro, Davies William ^a,b,c,h   Nirmaier, Thomas ^d,e   Vdovin, Gleb V ^b,f,i,j   Theuwissen, Albert J P ^a,b,g,k  

^a IEEE   (Brazil)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c FEDERAL UNIVERSITY OF MINAS GERAIS   (Brazil)

^d UNIVERSITY OF HEIDELBERG   (Germany)

^e INFINEON TECHNOLOGIES AG   (Germany)

^f Flexible Optical BV   (Netherlands)

^g DALSA Inc   (Netherlands)

^h International Society for Optical Engineering SPIE   (United States)

ⁱ RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

^j OPTICAL SOCIETY OF AMERICA   (United States)

^k Russian Academy of Sciences ^*

more..

Author keywords

Adaptive optics; Complementary metal oxide semiconductor (CMOS) technology; Image sensor; Optical profiling; Very large scale integration (VLSI); Wavefront sensor

Indexed keywords

CMOS TECHNOLOGY; OPTICAL PROFILING; WAVEFRONT SENSORS;

ADAPTIVE OPTICS; CMOS INTEGRATED CIRCUITS; IMAGE SENSORS; VLSI CIRCUITS; WAVEFRONTS;

OPTICAL SENSORS;

EID: 27744484667     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2005.854487     Document Type: Article

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