Novel analog readout electronics for microacoustic thickness shear-mode sensors

IEEE Sensors Journal

Volumn 5, Issue 5, 2005, Pages 1106-1111

  Jakoby, Bernhard ^a,b,d   Art, Georg ^b,e   Bastemeijer, Jeroen ^c,f  

^a IEEE   (Austria)

^b VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^d Industrial Sensor Systems Group of the VUT   (Austria)

^e CTR CARINTHIAN TECH RESEARCH AG   (Austria)

^f DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Microacoustic sensors; Sensor interface electronics; Viscosity sensors

Indexed keywords

MICROACOUSTIC SENSORS; SENSOR INTERFACE ELECTRONICS; STATIC CAPACITANCE; VISCOSITY SENSORS;

ACOUSTIC DEVICES; ANALOG STORAGE; CAPACITANCE; DAMPING; DETECTOR CIRCUITS; NATURAL FREQUENCIES; OSCILLATORS (ELECTRONIC); RESONATORS; SENSORS; VARIABLE FREQUENCY OSCILLATORS; VISCOSITY;

READOUT SYSTEMS;

EID: 27744478424     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2005.844330     Document Type: Article

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