Effect of composition of MOCVD-SrRuO3 top electrode of (Pb, La)(Zr, Ti)O3 capacitor on H2 degradation

Ferroelectrics

Volumn 260, Issue 1, 2001, Pages 57-62

  Okuda, Norikazu ^a   Higashi, Noriyuki ^a   Watanabe, Takayuki ^a   Funakubo, Hiroshi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

(Pb, La)(Zr, Ti)O3; H2 degradation; MOCVD; SrRuO3

Indexed keywords

(PB, LA)(ZR, TI)O3; FATIGUE TESTS; FERROELECTRIC CAPACITORS; H2 DEGRADATION; MOCVD; REMANENT POLARIZATION; SRRUO3; STOICHIOMETRIC COMPOSITIONS;

CAPACITORS; FATIGUE TESTING; HEAT TREATMENT; HYSTERESIS; HYSTERESIS LOOPS; LEAD; PLATINUM; ZIRCONIUM;

DEGRADATION;

EID: 27744449249     PISSN: 00150193     EISSN: 15635112     Source Type: Journal    
DOI: 10.1080/00150190108015994     Document Type: Article

References (3)

1. N. Okuda, N. Higashi, K. Ishikawa, N. Nukaga and H. Funakubo, Mater. Res. Soc. Proc, 596(2000) 79-84.
2. N. Okuda and H. Funakubo, Jpn. J. Appl. Phys., 39(2000) 572-576.
3. N. Okuda, T. Matsuzaki, K. Shinozaki, N. Mizutani and H. Funakubo, Trans. Mater. Res. Soc. Jpn., 24(1999) 51-54.