Avoiding MEMS failures

IEE Electronics Systems and Software

Volumn 3, Issue 5, 2005, Pages 22-25

  Lavu, Srikanth ^a   Desmulliez, Marc ^a   Begbie, Mark ^b   Ball, George ^b   De Wolf, Ingrid ^c  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

^b INSTITUTE FOR SYSTEM LEVEL INTEGRATION   (United Kingdom)

^c imec   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ENVIRONMENTAL POLLUTION; FAILURE MODE AND EFFECT ANALYSIS (FMEA); PARTICLE CONTAMINATION;

ENVIRONMENTAL IMPACT; FAILURE ANALYSIS; PROBLEM SOLVING;

MICROELECTROMECHANICAL DEVICES;

EID: 27644512231     PISSN: 14798336     EISSN: None     Source Type: Journal    
DOI: 10.1049/ess:20050503     Document Type: Review

References (0)