The AFM tweezers: Integration of a tweezers function with an AFM probe

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 621-624

  Takekawa, Tetsuya ^a   Nakagawa, Kazuhisa ^a   Hashiguchi, Gen ^a  

^a KAGAWA UNIVERSITY   (Japan)

Author keywords

AFM; Microtweezers; Nanoprobe

Indexed keywords

AFM; AFM PROBE DEVICE; MICROTWEEZERS; NANOPROBE;

ANISOTROPY; ATOMIC FORCE MICROSCOPY; ETCHING; MICROMACHINING; NANOSTRUCTURED MATERIALS; OXIDATION;

PROBES;

EID: 27544510702     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496494     Document Type: Conference Paper

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