A micromachined gas chromatographic column to optimize the gas selectivity for a resistive thin film gas sensor

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 2083-2086

  Stürmann, Jörg ^a   Benecke, Wolfgang ^a   Zampolli, Stefano ^b   Elmi, Ivan ^b   Cardinali, Gian Carlo ^b   Lang, Walter ^a  

^a UNIVERSITY OF BREMEN   (Germany)

^b CNR   (Italy)

Author keywords

Gas analysing system; Gas chromatography; Gas sensor

Indexed keywords

AIR QUALITY; CAPILLARY FLOW; CATALYST SELECTIVITY; CONCENTRATION (PROCESS); GAS CHROMATOGRAPHY; MICROMACHINING; SENSITIVITY ANALYSIS; SOLID STATE DEVICES; VOLATILE ORGANIC COMPOUNDS;

GAS ANALYZING SYSTEMS; GAS CHROMATOGRAPHIC COLUMN; LOADED CAPILLARY COLUMN; STATIONARY PHASES;

CHEMICAL SENSORS;

EID: 27544509126     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Terry, S. C.; Jerman, J. H.; Angell, J. B.: A gas chromatographic air analyzer fabricated on a silicon wafer. In: IEEE Transactions on Electron Devices ED-26 (1979), Nr. 12, S. 1880-6
2. See for example: "Air quality guidelines" - World Health Organization; www.who.int/
3. S.Zampolli, I.Elmi, F.Ahmed, M.Passini, G.C.Cardinali, S.Nicoletti and L.Dori, Elsevier Sensors and Actuators B: Chemical, To be published.
4. J. Stürmann, S. Junge, W. Benecke, S. Zampolli, L. Dori, S. Nicoletti, 16th IEEE Int. MEMS Conference, Kyoto, Japan, Jan. 19-23, 2003.
5. S.Zampolli, I.Elmi, J.Stürmann, S.Nicoletti, L.Dori, G.C.Cardinali, Sensors and Actuators B 105 (2005) 400-406